Product outline
Ideal for incorporating into inspection equipment of semiconductor manufacturing! Siloxane-free load-cell
At a manufacturing site of semiconductors, an equipment which does not let silicone resin generate siloxane is essential.
UWR is a beam type load cell that does not generate siloxane.
Taking into account the applications around silicon wafer, the fluorine resin cable is used.
Specifications
| Model | UWR-10N | |||
|---|---|---|---|---|
| Rated capacity | 10 N | |||
| Rated output | Approx. 0.5 mV/V | |||
| Safe overload | 300% R.C. | |||
| Zero balance | ±20% R.O. | |||
| Non-linearity | 0.03% R.O. | |||
| Hysteresis | 0.03% R.O. | |||
| Repeatability | 0.02% R.O. | |||
| Compensated temperature range |
0 to ＋50℃ | |||
| Safe temperature range | −10 to ＋70℃ | |||
| Temperature effect on zero | 0.5% R.O./10℃ | |||
| Temperature effect on span | 0.2% R.O./10℃ | |||
| Input resistance | Approx. 1000 Ω | |||
| Output resistance | Approx. 1000 Ω | |||
| Recommended excitation voltage |
5 V | |||
| Insulation resistance（DC 50 V） | 1000 MΩ or more | |||
| Cable | φ2 4-conductor fluorine resin cable (3m) Cable end: 5 wires |
Deflection at rated | 0.04 mm | |
| Natural frequency | 2.5 kHz | |||
| Weight | Approx. 40 g (not including cable) | |||
| Load cell material | Aluminum alloy | RoHs directive | 2011/65/EU(EU)2015/863 | |
Application example & Wiring diagram
External dimension
Download
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Product catalogue(PDF)
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Operation manual(PDF)
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External dimension
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DXF
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PDF
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Support tools
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Software
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