Displacement measurement

Our displacement sensor product line includes capacitive type with 0.3nm resolution and non-contact fiber optic type with 3MHz bandwidth. Those are used for ultra-precision positioning, gap measurement, runout measurement, flatness measurement, vibration measurement, and more.

Contactless electrostatic capacitive displacement sensor

PS-IA

* A wide variety of product lineup with standard measuring range from 30 μm to 5000 μm.

* The sensitivity of the sensor is not affected as far as target objects are made of conductor material.

* Free from the influence of surface roughness

* High linearity : ±0.05% or less

* Low noise : 0.002%/FS(rms) or less

* Responsiveness of 1 kHz

Contactless electrostatic capacitive displacement sensor with high responsiveness

PS-IA-HS

* A wide variety of product lineup with standard measuring range from 30 μm to 5000 μm.

* The sensitivity of the sensor is not affected as far as target objects are made of conductor material.

* Free from the influence of surface roughness

* High linearity : ±0.05% or less

* High responsiveness of 5 kHz

Multichannel PS sensor

PS-Ⅲ

* A wide variety of product lineup with standard measuring range from 30 μm to 1000 μm.

* The sensitivity of the sensor is not affected as far as the target object is made of conductor material.

* Free from the influence of surface roughness

* High linearity : ±0.05% or less

* Low noise : 0.002%/FS (rms) or less

Differential fiber-optic displacement sensor

ATW200

* Fast response up to 3 MHz bandwidth

* Extra-high resolution for the nanometer measurement capability

* Original fiber configurations and electronics eliminate the effect of the reflectivity variation of the target surface

* The variable low-pass filter is available

* Easy preparation for measurement

Digital Contact Sensor

ULE-50

* ULE-50 is a digital contact sensor designed for use with FS2000 and F381A-LDI.

* 50 mm stroke for various workpieces.

* Flexible cable for installation on moving parts.