Product outline

Ideal for incorporating into semiconductor manufacturing equipment!
Siloxane-free loadcell

At a manufacturing site of semiconductors, an equipment which does not let silicone resin generate siloxane is essential.
UWR is a beam type loadcell.
Taking into account the applications around silicon wafer, the Teflon sheathed cable is used.

Specifications

Model	UWR-10N
Rated capacity	10 N
Rated output	Approx. 0.5 mV/V
Safe overload	300% R.C.
Zero balance	±20% R.O.
Non-linearity	0.03% R.O.
Hysteresis	0.03% R.O.
Repeatability	0.02% R.O.
Compensated temperature range	0 to ＋50℃
Safe temperature range	−10 to ＋70℃
Temperature effect on zero	0.5% R.O./10℃
Temperature effect on span	0.2% R.O./10℃
Input resistance	Approx. 1000 Ω
Output resistance	Approx. 1000 Ω
Recommended excitation voltage	5 V
Insulation resistance（DC 50 V）	1000 MΩ or more
Cable	φ2 4 conductor Teflon sheathed cable (3m) Cable end: 5 wires
Deflection at rated	0.04 mm
Natural frequency	2.5 kHz
Weight	Approx. 40 g (not including cable)
Load cell material	Aluminum alloy

Example of use & Wiring diagram

External dimension

Download

Operation manual(PDF)
Product catalogue(PDF)		⇒Download Page
External dimension	DXF （ZIP）
External dimension	PDF
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